Large Chamber Scanning Electron Microscope
The large chamber SEM is a unique instrument that has been operated in Fürth since 2006 and continually optimized since. The remarkable 2 m3 chamber is large enough to fit a full size servohydraulic machine inside it. The newly redesigned electron gun assembly offers a lot of flexibility to inspect samples from every possible angle. It also combines several analytical detectors, such as EDS and BSD. Currently, the large chamber SEM is used for in-situ fatigue tests, as well as interrupted monitoring of large industrial components.